Boron11 Trifluoride
三氟化硼11，無色氣體，有窒息性。在空氣中遇濕氣立即水解，分解時生成劇毒的氟化物煙霧。三氟化硼反應性極強，遇水發生爆炸性分解，和水反應生成氟硼酸HBF4和硼酸，也可與金屬、有機物等可發生激烈反應。高純三氟化硼11是電子、光纖工業的重要原材料之一，是半導體生產中的重要摻雜源，用于半導體器件和集成電路生產的離子注入和摻雜。
Boron trifluoride is a kind of colorless and asphyxiating gas. It will immediately hydrolyze and decompose into highly toxic fluoride smog when it encounters with moisture in the air. Boron trifluoride is highly reactive, it explosively decomposes and reacts with water to generate HBF4 and boric acid when it encounters with water, it also reacts intensely with metal, organic matter and so on. High pure boron11 trifluoride is one of the important raw materials in the electronics and optical fiber industry, and it's an important dopant source in the semiconductor production. It is used for ion implantation and doping in semiconductor devices and integrated circuits.
| 項目Items | 單位Units | 指標Indexs | |
| 三氟化硼11 Boron11 Trifluoride≥ | Vol.% | 99.999 | 99.995 |
| 氮Nitrogen< | Vol.ppm | 2 | 20 |
| 氧+氬Oxygen+Argon < | Vol.ppm | 1 | 10 |
| 二氧化碳Carbon dioxide< | Vol.ppm | 1 | 5 |
| 四氟化碳Carbon tetrafluoride < | Vol.ppm | 1 | 5 |
| 四氟化硅Silicon tetrafluoride< | Vol.ppm | 5 | 10 |
| 總雜質含量Total impurity content≤ | Vol.ppm | 10 | 50 |
| 顆粒Particle | 供需雙方商定 Supply and demand agreement | 供需雙方商定 Supply and demand agreement | |
在電子工業中，高純三氟化硼11可用作半導體生產中的重要摻雜源。三氟化硼在有機合成中可用作催化劑，也可作為合成有機硼化合物的原料，在焊接鎂材時可用作焊劑。
In the electronic industry, high pure boron11 trifluoride can be used as an important dopant source in semiconductor production. Boron trifluoride can be used as a catalyst in organic synthesis or as raw material for the synthesis of organoboron compounds. Boron trifluoride can be used as a flux for the welding of magnesium materials.
三氟化硼11充裝于鋼瓶中，包裝規格為1 kg、2 kg和30 kg，瓶內壓力為11.8 MPa，具體包裝規格可根據用戶要求定制更改。產品儲存于干燥、陰涼的庫房中，遠離熱源、火源，與堿金屬、堿土金屬、烷基硝酸酯和石灰分開存放。
Boron11 trifluoride is filled in the cylinder. The packaging specifications include 1 kg, 2 kg and 30 kg. Specific packaging specifications can be customized according to users’ requirements. The product is stored in a dry and shady storeroom away from fire and heat source, it should be separately stored with alkali metals, alkaline earth metals, alkyl nitrates and lime.
