Titanium Tetrafluoride
四氟化鈦，又稱氟化鈦，分子式為TiF4，分子量為123.86，熔點為284℃，是一種具有吸濕性的白色粉末。四氟化鈦溶于冷水中可分解，溶于硫酸、乙醇和吡啶，不溶于乙醚。四氟化鈦在微電子工業、石化等行業中具有重要的應用。
Titanium tetrafluoride is also called titanium fluoride, its molecular formula is TiF4, molecular weight is 123.86, melting point is 284 ℃. Titanium tetrafluoride is a kind of hygroscopic white powder. Titanium tetrafluoride decomposes when it dissolves in cold water, it is soluble in sulfuric acid, ethanol and pyridine but it is insoluble in ether. Titanium tetrafluoride has important applications in microelectronics industry and petrochemical industry.
| 項目Items | 單位Units | 指標Index |
| 四氟化鈦Titanium tetrafluoride（TiF4）≥ | wt.% | 98.5 |
| 重金屬含量Heavy metal content≤ | wt.% | 0.1 |
| 氯化物含量Chloride content≤ | wt.% | 0.15 |
| 氟硅酸鹽含量Fluorosilicate content≤ | wt.% | 0.2 |
| 鐵含量Iron content≤ | wt.% | 0.1 |
| 硫酸鹽含量Sulphate content≤ | wt.% | 0.1 |
在電子工業中，四氟化鈦可用于成膜材料或離子注入摻雜，形成硅化鈦或鈦膜，制作低電阻、高熔點的電路互聯線和柵極。四氟化鈦在石化行業中可用作催化劑。
In the electronics industry, titanium tetrafluoride can be used for film forming materials and ion implantation doping, and consequently titanium silicide or titanium film is formed to produce interconnects and grid electrode with low resistance and high melting point. Titanium tetrafluoride can be used as catalyst in petrochemical industry.
四氟化鈦儲存于密封的銅質容器中，包裝規格為10g、100g，具體包裝規格可根據用戶需求定制更改。四氟化鈦儲存于陰涼、通風的庫房，庫溫不宜超過37℃，保持容器密封，遠離火種、熱源。儲區應備有泄漏應急處理設備和合適的收容材料。
Titanium tetrafluoride is stored in sealed copper containers with packing specifications of 10g and 100g. Specific packaging specifications can be customized according to users’ requirements. Titanium tetrafluoride is stored in shady and ventilated storeroom, temperature of storeroom is lower than 37℃, container is keeping seal away from fire and heat source. The storage area shall be equipped with equipment for emergency.
