Germanium Tetrafluoride
四氟化鍺（GeF4）是一種鍺的氟化物，分子量為148.63，無色、辛辣大蒜氣味氣體，空氣中遇水產生大量白煙。常態下四氟化鍺性質穩定，在水中發生水解，生成GeO2和H2GeF6。四氟化鍺在半導體行業中用于摻雜和離子注入。四氟化鍺結合乙硅烷氣體，可以直接在玻璃基底上制造硅鍺微晶。
Germanium tetrafluoride (GeF4) is a kind of fluoride of germanium with molecular weight of 148.63, it is colorless gas with pungent odor of garlic, it reacts with water to generate a lot of white smoke in the air. Germanium tetrafluoride is stable at normal temperature and pressure, and it is hydrolyzed in water and with generation of GeO2 and H2GeF6. Germanium tetrafluoride is used for doping and ion implantation in the semiconductor industry. Combined with ethylsilane gas, germanium tetrafluoride can be used to produce Si-Ge microcrystals on glass substrates.
| 項目Items | 單位Units | 指標Index |
| 四氟化鍺Germanium tetrafluoride（GeF4）≥ | Vol.% | 99.99 |
| 四氟化碳Carbon tetrafluoride（CF4）≤ | Vol.ppm | 10 |
| 氮氣Nitrogen（N2）≤ | Vol.ppm | 10 |
| 氧+氬Oxygen+ Argon（O2+Ar））≤ | Vol.ppm | 20 |
| 一氧化碳Carbon monoxide（CO）≤ | Vol.ppm | 10 |
| 二氧化碳Carbon dioxide（CO2）≤ | Vol.ppm | 5 |
| 二氧化硫Sulfur dioxide（N2O）≤ | Vol.ppm | 10 |
| 氟化氫Hydrogen fluoride（HF）≤ | Vol.ppm | 35 |
| 鉻Chromium（Cr）≤ | ppmw | 0.05 |
| 鐵Iron（Fe）≤ | ppmw | 0.08 |
| 錳Manganese（Mn）≤ | ppmw | 0.01 |
四氟化鍺在半導體行業中用于摻雜和離子注入。四氟化鍺結合乙硅烷氣體，可以直接在玻璃基底上制造硅鍺微晶。四氟化鍺在化學工業中還可用于合成試劑。
Germanium tetrafluoride is used for doping and ion implantation in the semiconductor industry. Combined with ethylsilane gas, germanium tetrafluoride can be used to produce Si-Ge microcrystals on glass substrates. Germanium tetrafluoride can also be used to synthesize reagents in the chemical industry.
四氟化鍺充裝在鋼質無縫氣瓶中，鋼瓶容積分別為2 L、5 L、8 L、10 L等。具體包裝規格可根據用戶需求定制更改。四氟化鍺儲存于陰涼、通風的庫房，遠離火種、熱源。儲區應備有泄漏應急處理設備。
Germanium tetrafluoride is stored in standard seamless cylinders, the packing specifications include 2L, 5L, 8L and 10L respectively. Specific packaging specifications can be customized according to user requirements. Germanium tetrafluoride is stored in a shady and ventilated storeroom away from fire and heat source. The storage area shall be equipped with equipment for emergency.
